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Fabrication and characterization of VO<sub>2</sub> thin films by direct current facing targets magnetron sputtering and low temperature oxidation https://journal.hep.com.cn/transtju/EN/10.1007/s12209-008-0031-9
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Fabrication and characterization of VO<sub>2</sub> thin films by direct current facing targets magnetron sputtering and low temperature oxidation https://journal.hep.com.cn/transtju/EN/10.1007/s12209-008-0031-9
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