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A new method to characterize the metallic-oxide films for grayscale lithography https://journal.hep.com.cn/ol/EN/10.1007/s11801-013-2351-9
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A new method to characterize the metallic-oxide films for grayscale lithography https://journal.hep.com.cn/ol/EN/10.1007/s11801-013-2351-9
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