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Impact of cooling condition on the crystal structure and surface quality of preferred <i>c</i>-axis-oriented AlN films for SAW devices https://journal.hep.com.cn/ol/EN/10.1007/s11801-011-1021-z
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Impact of cooling condition on the crystal structure and surface quality of preferred <i>c</i>-axis-oriented AlN films for SAW devices https://journal.hep.com.cn/ol/EN/10.1007/s11801-011-1021-z
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