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Model based reference metrology for dimensional characterization of micro- and nanostructures https://journal.hep.com.cn/ol/EN/10.1007/s11801-008-7095-6
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Model based reference metrology for dimensional characterization of micro- and nanostructures https://journal.hep.com.cn/ol/EN/10.1007/s11801-008-7095-6
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