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Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering https://journal.hep.com.cn/jowuotm/EN/10.1007/s11595-009-5702-4
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Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering https://journal.hep.com.cn/jowuotm/EN/10.1007/s11595-009-5702-4
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