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Development of <i>XY</i> scanner with minimized coupling motions for high-speed atomic force microscope https://journal.hep.com.cn/jocsu/EN/10.1007/s11771-011-0750-2
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Development of <i>XY</i> scanner with minimized coupling motions for high-speed atomic force microscope https://journal.hep.com.cn/jocsu/EN/10.1007/s11771-011-0750-2
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