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Optimal Actuator Placement and Active Vibration Control of Over-Actuated Motion System in the Wafer Stage https://journal.hep.com.cn/jbit/EN/10.15918/j.jbit1004-0579.18133
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Optimal Actuator Placement and Active Vibration Control of Over-Actuated Motion System in the Wafer Stage https://journal.hep.com.cn/jbit/EN/10.15918/j.jbit1004-0579.18133
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