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Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification https://journal.hep.com.cn/ijommam/EN/10.1007/s12613-024-2834-7
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Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification https://journal.hep.com.cn/ijommam/EN/10.1007/s12613-024-2834-7
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