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Micro/nano functional structure manufacturing from difficult-to-cut materials by etching and its combined machining strategies: A review https://journal.hep.com.cn/fme/EN/10.1007/s11465-025-0848-0
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Micro/nano functional structure manufacturing from difficult-to-cut materials by etching and its combined machining strategies: A review https://journal.hep.com.cn/fme/EN/10.1007/s11465-025-0848-0
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