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Measurement of Line-width and Line-width Roughness Based on Equivalent Area http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2011.01.04
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Measurement of Line-width and Line-width Roughness Based on Equivalent Area http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2011.01.04
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