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Scanning proximal microscopy study of the thin layers of silicon carbide-aluminum nitride solid solution manufactured by fast sublimation epitaxy https://doi.org/10.1051/epjconf/20134800002
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Scanning proximal microscopy study of the thin layers of silicon carbide-aluminum nitride solid solution manufactured by fast sublimation epitaxy https://doi.org/10.1051/epjconf/20134800002
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