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Mid-Spatial Frequency Error (PSD-2) of optics induced during CCOS and full-aperture polishing https://doi.org/10.2971/jeos.2013.13031
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Mid-Spatial Frequency Error (PSD-2) of optics induced during CCOS and full-aperture polishing https://doi.org/10.2971/jeos.2013.13031
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